List of materials analysis methods

• AED - Auger electron diffraction
• AES - Auger electron spectroscopy
• APS - Appearance potential spectroscopy
• CL - Cathodoluminescence
• DVS - Dynamic vapour sorption
• EBSD - Electron backscatter diffraction
• EID - Electron induced desorption
• EMP - Electron microprobe analysis
• ESCA - Electron spectroscopy for chemical analysis; see XPS
• ESD - Electron stimulated desorption
• FEM - Field emission microscopy
• FIM-AP - field ion microscopy-Atom probe
• FTIR - Fourier transform infrared absorption spectroscopy; e.g., ATR (Attenuated Total Reflection), GI (Grazing Incidence), DRIFTS (Diffuse Reflectance)
• GDMS - Glow discharge mass spectrometry
• GDOS - Glow discharge optical spectroscopy
• GISAXS - Grazing Incidence Small Angle X-ray Scattering
• GIXD - Grazing Incidence X-ray Diffraction
• HAS - Helium atom scattering
• HREELS - High resolution electron energy loss spectroscopy
• IAES - Ion induced Auger electron spectroscopy
• IGA - Intelligent gravimetric analysis
• IIX - Ion induced X-ray analysis
• INS - Ion neutralization spectroscopy
• IRS - Infra Red spectroscopy
• ISS - Ion scattering spectroscopy
• LEED - Low energy electron diffraction
• LEEM - Low energy electron microscopy
• LIBS - Laser induced breakdown spectroscopy
• LOES - Laser optical emission spectroscopy
• LS - Light (Raman) scattering
• NEXAFS - Near edge X-ray absorption fine structure
• PD - Photodesorption
• PDEIS - Potentiodynamic electrochemical impedance spectroscopy
• PED - Photoelectron diffraction (also called XPD, PhD, ARPEFS)
• PIXE - Particle (or proton) induced X-ray spectroscopy
• RBS - Rutherford back-scattering spectroscopy
• REM - Reflection electron microscopy
• RHEED - Reflection high energy electron diffraction
• SAXS - Small Angle X-ray Scattering
• SCANIIR - Surface composition by analysis of neutral species and ion-impact radiation
• SE - Spetroscopic ellipsometry
• SEIRA -Surface enhanced infrared absorption spectroscopy
• SEM - Scanning electron microscopy
• SEXAFS - Surface extended X-ray absorption fine structure
• SIMS - Secondary ion mass spectrometry
• SNMS - Sputtered neutral species mass spectroscopy
• SNOM - Scanning Near-Field Optical Microscopy
• SPM - Scanning probe microscopy
• UPS - UV-photoelectron spectroscopy
• WAXS - Wide Angle X-ray Scattering
• XAES - X-ray induced Auger electron spectroscopy
• X-CTR - X-ray crystal truncation rod scattering
• XDS - X-ray diffuse scattering
• XPEEM - X-ray photoelectron emission microscopy
• XPS - X-ray photoelectron spectroscopy
• XR - X-ray reflectivity
• XRF - X-ray fluorescence analysis